频域自相关变换

Halcom

频域自相关变换

1. * 使用自相关频域分析法分析wafer上的单个die的位置
   
2. * wafer是一种特殊的结构，相同的die重复出现的一个晶圆
   
3. *
   
4. dev_update_off ()
   
5. read_image (Wafer, 'wafer/wafer_dies')
   
6. get_image_size (Wafer, Width, Height)
   
7. dev_close_window ()
   
8. dev_open_window (0, 0, Width, Height, 'black', WindowHandle)
   
9. dev_display (Wafer)
   
10. *
    
11. * Compute the auto-correlation of the wafer image
    
12. * 时域到频域
    
13. rft_generic (Wafer, ImageFFT, 'to_freq', 'n', 'complex', Width)
    
14. correlation_fft (ImageFFT, ImageFFT, ImageCorrelation)
    
15. * 频域到时域
    
16. rft_generic (ImageCorrelation, ImageFFTInv, 'from_freq', 'n', 'real', Width)
    
17. *
    
18. * 计算相连dies之间的位置
    
19. local_max_sub_pix (ImageFFTInv, 'gauss', 3, 0.0001, Row, Column)
    
20. *
    
21. * 绘制第5个die到第6个die的距离图，第5个die到第9个die的距离图
    
22. I0 := 5
    
23. I1 := 6
    
24. I2 := 9
    
25. gen_arrow_contour_xld (Arrow, subset(Row,[I0,I0]), subset(Column,[I0,I0]), subset(Row,[I1,I2]), subset(Column,[I1,I2]), 15, 15)
    
26. gen_cross_contour_xld (Cross, Row, Column, 20, rad(45))
    
27. distance_pp (Row[I0], Column[I0], Row[I1], Column[I1], DistHor)
    
28. distance_pp (Row[I0], Column[I0], Row[I2], Column[I2], DistVert)
    
29. *
    
30. * Display the results
    
31. dev_display (Wafer)
    
32. disp_message (WindowHandle, ['Auto-correlation of the wafer image...','...corresponds to the die pitch'], 'image', 12, 12, 'black', 'true')
    
33. dev_set_color ('yellow')
    
34. dev_display (Arrow)
    
35. disp_message (WindowHandle, DistHor$ '.2f' + ' px', 'image', Row[I0] - 25, (Column[I0] + Column[I1]) * .5 - 50, 'yellow', 'false')
    
36. disp_message (WindowHandle, DistVert$ '.2f' + ' px', 'image', (Row[I2] + Row[I0]) * .5 - 15, Column[I0] - 100, 'yellow', 'false')
    
37. dev_set_color ('green')
    
38. dev_display (Cross)

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参考：
【1】Halcon 例程学习之频域自相关变换（ correlation_fft）
【2】仿射变换：水平矫正